規格

•乾式螺旋真空泵
•法蘭: JIS5K法蘭或ISO/NW/KF 真空法蘭 .可訂製ANSI 150 法蘭
•抽氣速度:100~1080m3/h
•最高真空:0.005 Torr
•馬力:3~30HP 三相220/380/440V 50/60 Hz

標準附件

•馬達
•消音器
•PLC控制器
•冷卻水流量計
•氮氣壓力計
•氮氣調節閥
•冷卻水及氮氣出入口配管
•泵浦機箱

用途

•含溶劑,粉塵及腐蝕性氣體真空製程
•高真空系統前級泵浦
•特用化學品及藥品製造
•半導體製造
•FPD製造
•其他PVD CVD真空製程

特點

•乾式運轉,不需水或真空油作密封液,可避免污染製程及作業環境
•螺旋式轉子,可避免傳統多級魯式或爪式轉子製程沉積物不易排出問題
•專利螺旋方程式,性能較傳統螺旋轉子提升15%以上
•0Hz可獲得與60Hz相同性能曲線
•可接受特別訂制防爆等級真空泵浦

選用附件

•三相感應馬達：208~480V60/50Hz。
•水氣分離桶。
•空氣噴射器。
•控制閥。
•真空計。
•流量計。
•循環式配管。
•防爆開關。
•PLC控制器。
•其他客戶指定之配件。

Specification
• Dry spiral vacuum pump
• Flange: JIS5K flange or ISO/NW/KF vacuum flange. Custom ANSI 150 flange
• Pumping speed: 100~1080m3/h
• Maximum vacuum: 0.005 Torr
• Horsepower: 3~30HP three-phase 220/380/440V 50/60 Hz

Standard Accessories
• Motor
• silencer
• PLC controller
• Cooling water flow meter
• Nitrogen pressure gauge
• Nitrogen regulating valve
• Cooling water and nitrogen inlet and outlet piping
• Pumping chassis

Applications
• Vacuum process with solvent, dust and corrosive gases
• High vacuum system fore pump
• Specialty chemicals and pharmaceutical manufacturing
• Semiconductor manufacturing
• FPD manufacturing
• Other PVD CVD vacuum processes

Features
• Dry operation, no water or vacuum oil is used as sealing liquid to avoid pollution process and working environment
• Spiral rotor to avoid the problem of traditional multi-stage Lu or claw rotor process deposits
• Patented spiral equation, performance is 15% higher than traditional spiral rotor
• 0Hz can get the same performance curve as 60Hz
• Can accept special customized explosion-proof grade vacuum pump

Optional accessories
• Three-phase induction motor: 208~480V60/50Hz.
• Water vapor separation barrel.
• Air ejector.
• Control valve.
• Vacuum gauge.
• Flow meter.
• Circulating piping.
• Explosion-proof switch.
• PLC controller.
• Other customer-specified accessories.